Inhoudsopgave:
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\u003ci\u003eSurface Metrology for Micro- and Nanofabrication\u003c/i\u003e presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.\u003cul\u003e \u003cli\u003eProvides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology \u003c/li\u003e \u003cli\u003eHelps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components\u003c/li\u003e \u003cli\u003eAssesses the best techniques for repairing micro-defects\u003c/li\u003e\u003c/ul\u003e |
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